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Material design problems of plasma-chemical reactors for disposal perfluorinated compounds
Brožek, Vlastimil ; Březina, Václav ; Mastný, L. ; Kubatík, Tomáš František ; Živný, Oldřich
Reduction of perfluorinated gases emissions from semiconductor industry has recently introduced a serious problem from both technological and economic side. With respect to chemistry of the decomposition reactions the most effective abatement techniques developed up to now consists in the interaction of those gaseous pollutants with several types of plasmas. In the framework of Czech-Taiwanese bilateral project No. 17-10246J 'Decomposition of Perfluorinated Compounds and Fluorinated Ozone Depleting Substances' a new plasmochemical reactor design is to be solved. In this reactor the plasma abatement process consisting of interaction of the plasma generated by unique watter stabilized H-WSP plasma torch at temperatures ranging\nfrom 2000 K up to 25,000 K with the treated gases will be carried out. However, the main product generated in the reactor during the steam plasma abatement process is hydrogen fluoride which causes corrosion of almost every construction material. The aim pursued by the work presented is to search for the materials resistant to exposition of HF even at high temperatures. To investigate corrosion resistance of construction materials with thermal stability within temperature interval 2700-3000 °C titan nitride, boron nitride, and silicon carbide have been selected. The samples of those materials have been prepared by spark plasma sintering method and exposed to concentrated solution of hydrofluoric acid for which corrosion rates have been measured
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Nitridové materiály v oblasti nanotechnologií
Dufek, V. ; Brožek, Vlastimil
Příspěvek upozorňuje na výsledky českého výzkumu nitridů. Pokud jde o nitrid titanu, jsme v oblasti nanotechnologií na světové úrovni. Ve výzkumu nitridu křemičitého ani nitridu boritého, kde jsme byli v některých ohledech před světovou špičkou, se bohužel nepokračuje a dokonce úspěšná výroba kubického nitridu boritého v Prametu Šumperk a kompaktního nitridu boritého v dřívějším OVÚ Karlštejn byla zastavena. Z informací bayreuthské univerzity o vývoji velice tvrdého materiálu ACNR (Aggregated Carbon NanoRods), tvořeného semknutými nanoklastry fullerenu, je nepřímo dán pracovní návod, jak z fullerenu podobných sloučenin boru a dusíku připravit i nové typy boronitu tvrdšího než diamant.
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